R-FIT LIVE – ORS – Thin-film monitoring systems

The future of in situ metrology is here - TODAY!

R-Fit© LIVE is the most comprehensive in situ analysis software available. Providing LIVE metrology data “on-the-fly” is in situ metrology at it’s very best. The ability to quantify items such as growth rate, complex refractive index and RMS roughness as it happens, allows you to make immediate quantified decisions to change your process - as you are growing. In turn, this will increase yeilds, reduce down-time and improve the quality of your structures.

This unique, fully automated, software facilitates immediate quantative pass/fail information as well as providing the ability to close the loop on your feedback-control system.

Combined with the power of ORS’ reflectance tools, the EpiEYE or MiniEYE, this fantastic software will leave you wondering how you ever managed without it. Whilst the hardware performs the number crunching as the data is acquired R-Fit© LIVE will present you with the information you need as you need it - during deposition. The ability to “fit” sub quarter-wave layers is not only unique but an absolute must when growing complex structures such as VCSEL’s.

ORS - Optical Reference Systems - R-FIT LIVE

If you want to be ahead of the competitors, whilst increasing yeilds and reducing down-time, R-Fit© LIVE is the perfect solution.