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ORS’ versatile in situ metrology solutions can be installed on any type of thin film deposition system. Whichever type of reactor or chamber you use - whether commercial or custom built - our bolt-on, simple to align instruments are totally flexible to fit your needs.

In industry or research, monitoring your process is essential; reliable information is a must if you want to lead the way, increase your yields, improve your quality or even design a new material or process. ORS is dedicated to the pursuit of real, usable information in the arena of thin-film metrology. Our solutions provide instantaneous “information”, not just graphs that need hours of interpretation. Our unique software provides a fully automated, quantitative analysis in real time and gives you the ability to manually change the process “on-the-fly” or even use a closed-loop feedback control system.

Our software enables you to create theoretical “fits” and then analyse the LIVE process to produce your structure in reality.

We are currently updating our technical and marketing material - please contact us if you would like more information.

Please contact us to discuss your requirements.

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• Latest news
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  Y-Systems chooses ORS Ltd
• Vigo Systems get great results from ORS II/VI solution
• Worldwide agencies:
  ORS anounce worldwide agency network

• Conferences
• 
• Semicon Taiwan 2010, September 8-10 2010, Taipei World Trade Center, Taipei, Taiwan
  
• You're invited to visit Optical Reference Systems at Semicon Taiwan 2010 at the Taipei World Trade Center in Taipei, Taiwan. We are located in the South Hall at Booth # 2929
• Click Here for the Floorplan

• Latest products
• EpiREF: Easy to install , laser based in situ reflectance monitor
• EpiEYE: Combines the laser based reflectance of the EpiREF with temperature measurement
• EpiEYE Blue: All the features of the EpiEYE with additional measurements at 405nm
• ORS ARC: A single beam in situ wafer bow measurement tool
• R-Fit Live: Increases reactor up-time and wafer yield
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