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Optical Reference Systems (ORS) Ltd

Provide in situ metrology solutions for many types of thin film deposition systems.

Compatible on most major reactor designs and with many successful installations on "home built" reactors and chambers, the ORS EpiEYE series of in situ devices are accurate and adaptable for the successful deposition of thin films.

Solutions include:

• Emissivity corrected pyrometry
• Growth rate
• Wafer bow/curvature

Whether you are growing VCSELs, HEMT, lasers, QCLs, solar cells etc, III-V and II-VI and oxides, in production or R&D; ORS has the in situ metrology solution you require.

Custom solutions are the speciality of ORS and with many successful installations; you buy in the knowledge that you are getting the best solution for your requirements.

Please speak to our agent for more information or contact us.

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• Latest news
• 
  Y-Systems chooses ORS Ltd
• Vigo Systems get great results from ORS II/VI solution
• Worldwide agencies:
  ORS anounce worldwide agency network

• Conferences
• 15th International Conference on Metal Organic Vapor Phase Epitaxy
• 
• May 23-28, 2010.
  Hyatt Regency, Lake Tahoe

• Latest products
• EpiREF: Easy to install , laser based in situ reflectance monitor
• EpiEYE: Combines the laser based reflectance of the EpiREF with temperature measurement
• EpiEYE Blue: All the features of the EpiEYE with additional measurements at 405nm
• ORS ARC: A single beam in situ wafer bow measurement tool
• R-Fit Live: Increases reactor up-time and wafer yield
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